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Effect of scandium concentration on the performances of cantilever based AlN unimorph piezoelectric energy harvester with silicon nitride substrate

Abstract Microelectromechanical systems (MEMS) offer its ability to sense, control and actuate on sub-micron scale and exhibit its effect on macro scale. To implement any specific MEMS system, small, efficient and long-lifespan micro power sources are required. Piezoelectric energy harvester (PEH) a...

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Principais autores: Tasnia Sultana, Manjurul Gani, Sharmin Shultana, Abdullah Al Miraj, Asif Mahbub Uddin, Joyprokash Chakrabartty
Format: Artigo
Sprog:Inglês
Udgivet: SpringerOpen 2024-07-01
Serier:Materials for Renewable and Sustainable Energy
Fag:
MEMS
Micropower generation
Piezoelectricity
Unimorph Cantilever
Radioisotope
Online adgang:https://doi.org/10.1007/s40243-024-00272-9
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