Surface smoothing effect of an amorphous thin film deposited by atomic layer deposition on a surface with nano-sized roughness
Previously, Lau (one of the authors) pointed out that the deposition of an amorphous thin film by atomic layer deposition (ALD) on a substrate with nano-sized roughness probably has a surface smoothing effect. In this letter, polycrystalline zinc oxide deposited by ALD onto a smooth substrate was us...
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| Главные авторы: | , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
AIP Publishing LLC
2014-02-01
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| Серии: | AIP Advances |
| Online-ссылка: | http://dx.doi.org/10.1063/1.4866988 |
| Метки: |
Нет меток, Требуется 1-ая метка записи!
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