The source of macroparticle-free plasma flows for nanoelectronics
The paper describes the source of solid-phase materials plasma flow generated by vacuum-arc discharge in vapours of diffuse evaporated anode. The source can efficiently create macroparticle-free plasma flows of various metals in vacuum, and provided the vacuum chamber is filled with required working...
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Politekhperiodika
2013-06-01
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| coleção: | Технологія та конструювання в електронній апаратурі |
| Assuntos: | |
| Acesso em linha: | https://tkea.com.ua/index.php/journal/article/view/366 |
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