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Angle-Selective Photodetection in Ge/Si Quantum Dot Photodiodes Enhanced by Microstructured Hole Arrays

We report on the near-infrared (NIR) photoresponse of a micropatterned Ge/Si quantum dot (QD) pin photodiode at different angles of radiation incidence. The photon-trapping hole array was etched through the n+-type top contact layer to reach the buried QDs. The normal-incidence responsivity was obse...

Ausführliche Beschreibung

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Bibliografische Detailangaben
Hauptverfasser: Andrew I. Yakimov, Victor V. Kirienko, Aleksei A. Bloshkin, Dmitrii E. Utkin, Anatoly V. Dvurechenskii
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2023-07-01
Schriftenreihe:Photonics
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Online-Zugang:https://www.mdpi.com/2304-6732/10/7/764
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