Characterization of DLC Thin Films Deposited by DC-Pulsed PACVD using Methane Precursor
In this work, Diamond Like Carbon (DLC) thin films were deposited on aluminum alloy 6061 by Plasma-Assisted Chemical Vapor Deposition (PACVD). Nitiding prior to coated leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coatings. The composition, crysta...
Gorde:
| Egile Nagusiak: | , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Islamic Azad University-Isfahan (Khorasgan) Branch
2022-03-01
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| Saila: | International Journal of Advanced Design and Manufacturing Technology |
| Gaiak: | |
| Sarrera elektronikoa: | https://admt.isfahan.iau.ir/article_689935_3f5dff04365d9ea68b450e11dde516d4.pdf |
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