Three-coordinate the piezoceramic scanner on bimorphic piezoelements for probe nanomicroscope
A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillation...
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| Main Authors: | , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
Politekhperiodika
2007-08-01
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| Series: | Технологія та конструювання в електронній апаратурі |
| Subjects: | |
| Online Access: | https://tkea.com.ua/index.php/journal/article/view/832 |
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