Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide

This paper presents results of numerical modeling of a modified design of an optical sensor based on segmented periodic silicon oxynitride (SiON) grating evanescently coupled with silicon wire. This segmented grating works as a leaky waveguide, which filters input power from a broadband optical sour...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Andrei Tsarev, Vittorio M. N. Passaro
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2020-09-01
Sarja:	Sensors
Aiheet:	optical sensors silicon wire silicon oxynitride (SiON) segmented grating far field pattern numerical modeling
Linkit:	https://www.mdpi.com/1424-8220/20/18/5306
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