Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO₃ Crystal/Si Layered Structure

The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO₃ crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons...

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Autors principals:	Dmitry Roshchupkin, Evgenii Emelin, Olga Plotitcina, Anatoly Mololkin, Oleg Telminov
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2021-09-01
Col·lecció:	Crystals
Matèries:	LiNbO<sub>3</sub> crystal Si crystal surface acoustic wave X-ray diffraction scanning electron microscopy LiNbO<sub>3</sub>/Si layered structure
Accés en línia:	https://www.mdpi.com/2073-4352/11/9/1082
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