Advancements in greenhouse gas emission reduction methodology for fluorinated compounds and N2O in the semiconductor industry via abatement systems

Greenhouse gases (GHGs), particularly fluorinated compounds (FCs), nitrous oxide (N2O), and nitrogen trifluoride (NF3), contribute significantly to climate change, and the semiconductor industry is a notable emitter of these gases. This report introduces an innovative methodology for GHG emission re...

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Hlavní autoři:	Yue Zhou, Yuanzhe Li, Emily Ong
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Frontiers Media S.A. 2024-01-01
Edice:	Frontiers in Energy Research
Témata:	greenhouse gas (GHG) GHG emission reduction removal methodology semiconductor industry gas abatement system
On-line přístup:	https://www.frontiersin.org/articles/10.3389/fenrg.2023.1234486/full
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