Microwave plasma-chemical deposition of structures for high-aperture planar optical waveguides
The features of forming planar optical waveguides based on quartz glass in a waveguide-type microwave plasmatron operating in the H10 mode have been studied. The proposed microwave discharge excitation device has demonstrated its effectiveness in the development of optical structures of the composit...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Politekhperiodika
2005-12-01
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| coleção: | Технологія та конструювання в електронній апаратурі |
| Assuntos: | |
| Acesso em linha: | https://tkea.com.ua/index.php/journal/article/view/1005 |
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