Wafer-Scale Fabrication of Silicon Film on Lithium Niobate on Insulator (LNOI)

Hybrid integration of silicon photonics with lithium niobate (LN) devices provides a promising route to enable an excellent modulation performance in silicon photonic integrated circuits. To realize this purpose, a substrate containing a Si film on an LNOI substrate, called Si on the LNOI structure,...

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Principais autores:	Yang Chen, Xiaomeng Zhao, Zhongxu Li, Xinjian Ke, Chengli Wang, Min Zhou, Wenqin Li, Kai Huang, Xin Ou
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2022-10-01
Series:	Crystals
Assuntos:	LNOI silicon photonics ion-cut process
Acceso en liña:	https://www.mdpi.com/2073-4352/12/10/1477
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