Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures

In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the...

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Principais autores:	Selina Burkert, Lukas Schwörer, Tim Schubert, Jana Grundmann, David Stein, Andreas Heinrich
格式:	Artigo
语言:	Inglês
出版:	MDPI AG 2024-11-01
丛编:	Metrology
主题:	measurement analysis scanning electron microscopy white light interferometry atomic force microscopy micro computed tomography optical coherence tomography
在线阅读:	https://www.mdpi.com/2673-8244/4/4/40
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