A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode

Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...

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Bibliografski detalji

Glavni autori:	Bo Jiang, Yan Su, Guowen Liu, Lemin Zhang, Fumin Liu
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2020-12-01
Serija:	Micromachines
Teme:	MEMS device gyroscope outer-frame-anchor high-quality factor
Online pristup:	https://www.mdpi.com/2072-666X/11/12/1071
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