Leveling Method of Working Platform Based on PZT Electromechanical Coupling Effect
Lead zirconate titanate (PZT) piezoelectric ceramics are widely used functional materials due to their strong and stable piezoelectric properties. A leveling method based on lead zirconate titanate piezoelectric ceramics is proposed for the high level of accuracy required in microelectromechanical f...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2025-07-01
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| Series: | Micromachines |
| Assuntos: | |
| Acceso en liña: | https://www.mdpi.com/2072-666X/16/7/796 |
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