Simulation and fabrication of high frequency piezoelectric micromachined ultrasonic transducer based on PZT film

Piezoelectric micromachined ultrasonic transducer (PMUT) is hotspot in the study of biomedicine ultrasonic imaging. Lead zirconate titanate (PbZrO₃-PbTiO₃, PZT) piezoelectric film is the key piezoelectric material used in micromechanical ultrasonic transducers. In this paper, a...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	LIU Yaqi, CHEN Mingzhu, ZHANG Qiaozhen, ZHAO Xiangyong, WANG Jushan, TANG Yanxue, WANG Feifei, WANG Shuhao, WANG Yaojin, MIAO Bin, LI Jiadong
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	Academic Journals Center of Shanghai Normal University 2023-10-01
Sarja:	上海师范大学学报. 自然科学版
Aiheet:	piezoelectric micromachined ultrasonic transducer(pmut) high frequency lead zirconate titanate(pbzro<sub>3</sub>-pbtio<sub>3</sub>,pzt) film device preparation
Linkit:	http://shnu.ijournals.cn/zrkxb/shsfqkszrb/ch/reader/view_abstract.aspx?file_no=20230509
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