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Transparent Ferroelectric Capacitors on Glass

We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer layer on the fused silica substrate, are highly t...

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Principais autores: Daniele Sette, Stéphanie Girod, Renaud Leturcq, Sebastjan Glinsek, Emmanuel Defay
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2017-10-01
Serier:Micromachines
Fag:
transparent piezoelectrics
glass substrate
chemical solution deposition
Online adgang:https://www.mdpi.com/2072-666X/8/10/313
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