Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We h...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Philipp Taus, Adrian Prinz, Heinz D. Wanzenboeck, Patrick Schuller, Anton Tsenov, Markus Schinnerl, Mostafa M. Shawrav, Michael Haslinger, Michael Muehlberger
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2021-04-01
Schriftenreihe:	Nanomaterials
Schlagworte:	nanoimprint lithography (NIL) undercut features master Blu-Ray patterning reactive ion etching
Online-Zugang:	https://www.mdpi.com/2079-4991/11/4/956
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