Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morp...

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Hlavní autoři:	Serguei Chiriaev, Luciana Tavares, Vadzim Adashkevich, Arkadiusz J. Goszczak, Horst-Günter Rubahn
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Beilstein-Institut 2020-11-01
Edice:	Beilstein Journal of Nanotechnology
Témata:	direct patterning focused helium ion beam out-of-plane nanopatterning polymers thin films
On-line přístup:	https://doi.org/10.3762/bjnano.11.151
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