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DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA

Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings dep...

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Autori principali: A. P. Burmakov, V. A. Zaikov, F. F. Komarov, O. R. Lyudchik, D. A. Saladukha
Natura: Artigo
Lingua:Inglês
Pubblicazione: Belarusian National Technical University 2015-04-01
Serie:Приборы и методы измерений
Soggetti:
magnetron
deposition
laser
plasma
spectroscopy
Accesso online:https://pimi.bntu.by/jour/article/view/112
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