Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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| Principais autores: | , |
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| Formato: | Livro |
| Idioma: | Inglês |
| Publicado em: |
MDPI - Multidisciplinary Digital Publishing Institute
2017
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| Assuntos: | |
| Acesso em linha: | https://directory.doabooks.org/handle/20.500.12854/53383 |
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