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MEMS: a practical guide of design, analysis, and applications
MEMS are rapidly moving from the research laboratory to the mar ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group ex...
Gorde:
| Egile Nagusiak: | , |
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| Formatua: | Livro |
| Hizkuntza: | Inglês |
| Argitaratua: |
Springer Berlin Heidelberg,
2006
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| Edizioa: | 1st ed. 2006. |
| Gaiak: | |
| Sarrera elektronikoa: | https://minerva.ufrj.br/F/?func=direct&doc_number=000895362&local_base=UFR01 |
| Etiketak: |
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