The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

по Frasca, Simone, Leghziel, Rebecca C., Arabadzhiev, Ivo N., Pasquier, Benoît, Tomassi, Grégoire F. M., Carrara, Sandro, Charbon, Edoardo
Опубликовано в: Sci Rep (2021)