Resultados da pesquisa por Autor

1

Angstrom-scale flatness using selective nanoscale etching

Angstrom-scale flatness using selective nanoscale etching

Por Takashi Yatsui, Hiroshi Saito, Katsuyuki Nobusada
Publicado em 2017-10-01

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2

Surface improvement of organic photoresists using a near-field-dependent etching method

Surface improvement of organic photoresists using a near-field-dependent etching method

Por Felix J. Brandenburg, Tomohiro Okamoto, Hiroshi Saito, Benjamin Leuschel, Olivier Soppera, Takashi Yatsui
Publicado em 2017-04-01

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