Wet Chemical Oxidation to Improve Interfacial Properties of Al₂O₃/Si and Interface Analysis of Al₂O₃/SiO_x/Si Structure Using...

Por Kwan Hong Min, Sungjin Choi, Myeong Sang Jeong, Sungeun Park, Min Gu Kang, Jeong In Lee, Yoonmook Kang, Donghwan Kim, Hae-Seok Lee, Hee-eun Song
Publicado em 2020-04-01