Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

מאת Son, Jangyup, Kwon, Junyoung, Kim, SunPhil, Lv, Yinchuan, Yu, Jaehyung, Lee, Jong-Young, Ryu, Huije, Watanabe, Kenji, Taniguchi, Takashi, Garrido-Menacho, Rita, Mason, Nadya, Ertekin, Elif, Huang, Pinshane Y., Lee, Gwan-Hyoung, M. van der Zande, Arend
הוצא לאור ב Nat Commun (2018)