High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction

Por Cooper, David, Bernier, Nicolas, Rouvière, Jean-Luc, Wang, Yun-Yu, Weng, Weihao, Madan, Anita, Mochizuki, Shogo, Jagannathan, Hemanth
Publicado no Appl Phys Lett (2017)