Influence of zirconium addition on microstructure, hardness and oxidation resistance of tantalum nitride thin films

由 Erikson Santos, Jonh Yago, Romão Terto, André, Angel Ramirez, Daniel, Valeriano dos Santos, Júlio César, dos Santos Silva Brito, Beatriz, Fernando Sabino, Luís, Lemos Dias, Iago, Hübler, Roberto, Kirinus Tentardini, Eduardo
出版 2021