Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source

Por Kim, Ki Seok, Kim, Ki Hyun, Ji, You Jin, Park, Jin Woo, Shin, Jae Hee, Ellingboe, Albert Rogers, Yeom, Geun Young
Publicado no Sci Rep (2017)