On the transformation of a-Si:H surface to very thin insulating overlayer of device quality due to very low-energy particle impacts

Por E. Pinčík, R. Brunner, V. Nádaždy, J. Müllerová, K. Gmucová, R. Durný, M. Jergel, C. Falcony, L. Ortega, H. Glesková
Publicado no Superficies y vacío (2002)