Nanoporous silicon nitride-based membranes of controlled pore size, shape and areal density: Fabrication as well as electrophoretic and molecular filtering characterization

Por Seidenstücker, Axel, Beirle, Stefan, Enderle, Fabian, Ziemann, Paul, Marti, Othmar, Plettl, Alfred
Publicado no Beilstein J Nanotechnol (2018)