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Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency
We report on the development of a full operational rotating analyzer spectroscopic ellipsometer. This instrument employs a phase-sensitiveamplifier to process the optical signal as an alternative to Fast Fourier Transform analysis. We describe electronic hardware designed tostabilize the rotation fr...
Gardado en:
| Publicado en: | Revista Mexicana de Física |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Sociedad Mexicana de Física A.C.
2005
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=57063909 |
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