APA Alıntı

Li, H., Lin, Z., Guo, Y., Song, J., Huang, R., & Lin, Z. (2021). The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines (Basel).

Chicago Stili Alıntı

Li, Hongliang, Zewen Lin, Yanqing Guo, Jie Song, Rui Huang, ve Zhenxu Lin. "The Effect of Nitrogen Incorporation On the Optical Properties of Si-Rich A-SiCx Films Deposited By VHF PECVD." Micromachines (Basel) 2021.

MLA Alıntı

Li, Hongliang, et al. "The Effect of Nitrogen Incorporation On the Optical Properties of Si-Rich A-SiCx Films Deposited By VHF PECVD." Micromachines (Basel) 2021.