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Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements
The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Sensors (Basel) |
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| Κύριοι συγγραφείς: | , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2021
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8124870/ https://ncbi.nlm.nih.gov/pubmed/33946219 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21093117 |
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