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Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration
A novel atomic layer method for encapsulating individual micro- and nano-particles with thin (sub-10-nm) dielectric films is presented. This method leverages the diffusion of vapor-phase precursors through an underlying inert polymer film to achieve growth of a metal oxide film on all sides of the p...
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| Publicado no: | Adv Mater Interfaces |
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| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7942784/ https://ncbi.nlm.nih.gov/pubmed/33708471 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/admi.202001323 |
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