Manouras, T., & Argitis, P. (2020). High Sensitivity Resists for EUV Lithography: A Review of Material Design Strategies and Performance Results. Nanomaterials (Basel).
Stile di citazione ChicagoManouras, Theodore, e Panagiotis Argitis. "High Sensitivity Resists for EUV Lithography: A Review of Material Design Strategies and Performance Results." Nanomaterials (Basel) 2020.
Citazione MLAManouras, Theodore, e Panagiotis Argitis. "High Sensitivity Resists for EUV Lithography: A Review of Material Design Strategies and Performance Results." Nanomaterials (Basel) 2020.
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