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Study on Characteristics of Electromagnetic Coil Used in MEMS Safety and Arming Device

Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the elec...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Sun, Yi, Lou, Wenzhong, Feng, Hengzhen, Zhao, Yuecen
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7463630/
https://ncbi.nlm.nih.gov/pubmed/32751964
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11080749
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