Kilic, U., Mock, A., Sekora, D., Gilbert, S., Valloppilly, S., Melendez, G., . . . Schubert, M. (2020). Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. Sci Rep.
Citação norma ChicagoKilic, Ufuk, et al. "Precursor-surface Interactions Revealed During Plasma-enhanced Atomic Layer Deposition of Metal Oxide Thin Films By In-situ Spectroscopic Ellipsometry." Sci Rep 2020.
Citação norma MLAKilic, Ufuk, et al. "Precursor-surface Interactions Revealed During Plasma-enhanced Atomic Layer Deposition of Metal Oxide Thin Films By In-situ Spectroscopic Ellipsometry." Sci Rep 2020.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.