Hansen, K., Cardona, M., Dutta, A., & Yang, C. (2020). Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH(3). Materials (Basel).
Chicago Style citaatHansen, Katherine, Melissa Cardona, Amartya Dutta, en Chen Yang. "Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH(3)." Materials (Basel) 2020.
MLA citatieHansen, Katherine, Melissa Cardona, Amartya Dutta, en Chen Yang. "Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH(3)." Materials (Basel) 2020.
Let op: Deze citaties zijn niet altijd 100% accuraat.