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Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...
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Izdano u: | Sensors (Basel) |
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Glavni autori: | , , , , , , , , |
Format: | Artigo |
Jezik: | Inglês |
Izdano: |
MDPI
2019
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Teme: | |
Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6806205/ https://ncbi.nlm.nih.gov/pubmed/31597318 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19194346 |
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