APA citiranje

Ma, H., Yang, J., Yang, J., Zhu, L., Huang, W., Yuan, G., . . . Lu, H. (2019). Systematic Study of the SiO(x) Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiO(x)/SiO(2) Super-Lattice. Nanomaterials (Basel).

Citação norma Chicago

Ma, Hong-Ping, Jia-He Yang, Jian-Guo Yang, Li-Yuan Zhu, Wei Huang, Guang-Jie Yuan, Ji-Jun Feng, Tien-Chien Jen, and Hong-Liang Lu. "Systematic Study of the SiO(x) Film With Different Stoichiometry By Plasma-Enhanced Atomic Layer Deposition and Its Application in SiO(x)/SiO(2) Super-Lattice." Nanomaterials (Basel) 2019.

MLA citiranje

Ma, Hong-Ping, et al. "Systematic Study of the SiO(x) Film With Different Stoichiometry By Plasma-Enhanced Atomic Layer Deposition and Its Application in SiO(x)/SiO(2) Super-Lattice." Nanomaterials (Basel) 2019.