Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system co...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Saqib, Muhammad, Mubasher Saleem, Muhammad, Mazhar, Naveed, Awan, Saif Ullah, Shahbaz Khan, Umar
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6266985/
https://ncbi.nlm.nih.gov/pubmed/30400677
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9110577
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