A carregar...
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning electron microscopes), a tuneable Q-factor of...
Na minha lista:
| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6263779/ https://ncbi.nlm.nih.gov/pubmed/30423949 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18113842 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|