Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybr...

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Bibliografiska uppgifter
I publikationen:Micromachines (Basel)
Huvudupphovsmän: Valadeiro, João, Cardoso, Susana, Macedo, Rita, Guedes, Andre, Gaspar, João, Freitas, Paulo P.
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2016
Ämnen:
Review
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189911/
https://ncbi.nlm.nih.gov/pubmed/30404264
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7050088
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