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Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification

This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floa...

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Pubblicato in:Micromachines (Basel)
Autori principali: Han, Ke, Guo, Xubing, Smith, Stewart, Deng, Zhongliang, Li, Wuyu
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2018
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187246/
https://ncbi.nlm.nih.gov/pubmed/30424323
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9080390
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