Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. (. M. M., & Mackus, A. J. M. (2017). Area-Selective Atomic Layer Deposition of SiO(2) Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle. ACS Nano.
Chicago Stili AlıntıMameli, Alfredo, Marc J. M. Merkx, Bora Karasulu, Fred Roozeboom, Wilhelmus (Erwin) M. M. Kessels, ve Adriaan J. M. Mackus. "Area-Selective Atomic Layer Deposition of SiO(2) Using Acetylacetone As a Chemoselective Inhibitor in an ABC-Type Cycle." ACS Nano 2017.
MLA AlıntıMameli, Alfredo, et al. "Area-Selective Atomic Layer Deposition of SiO(2) Using Acetylacetone As a Chemoselective Inhibitor in an ABC-Type Cycle." ACS Nano 2017.
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