Lee, H., Park, J., Xianyu, W., Kim, K., Chung, J. G., Kyoung, Y. K., . . . Shin, J. K. (2017). Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature. Sci Rep.
シカゴスタイル引用形Lee, Hyung-Ik, et al. "Degradation By Water Vapor of Hydrogenated Amorphous Silicon Oxynitride Films Grown At Low Temperature." Sci Rep 2017.
MLA引用形式Lee, Hyung-Ik, et al. "Degradation By Water Vapor of Hydrogenated Amorphous Silicon Oxynitride Films Grown At Low Temperature." Sci Rep 2017.
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