Lomov, A., Shcherbachev, K., Chesnokov, Y., & Kiselev, D. (2017). The microstructure of Si surface layers after plasma-immersion He(+) ion implantation and subsequent thermal annealing. J Appl Crystallogr.
Citação norma ChicagoLomov, Andrey, Kirill Shcherbachev, Yurii Chesnokov, and Dmitry Kiselev. "The Microstructure of Si Surface Layers After Plasma-immersion He(+) Ion Implantation and Subsequent Thermal Annealing." J Appl Crystallogr 2017.
Citação norma MLALomov, Andrey, Kirill Shcherbachev, Yurii Chesnokov, and Dmitry Kiselev. "The Microstructure of Si Surface Layers After Plasma-immersion He(+) Ion Implantation and Subsequent Thermal Annealing." J Appl Crystallogr 2017.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.