Chargement en cours...
Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams
The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique based on resonant frequency monitoring of c...
Enregistré dans:
| Publié dans: | J Micromech Microeng |
|---|---|
| Auteurs principaux: | , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2016
|
| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5165653/ https://ncbi.nlm.nih.gov/pubmed/28008214 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/26/11/115006 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|