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Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams

The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique based on resonant frequency monitoring of c...

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Detalles Bibliográficos
Publicado en:J Micromech Microeng
Autores principales: Krakover, Naftaly, Ilic, B. Robert, Krylov, Slava
Formato: Artigo
Lenguaje:Inglês
Publicado: 2016
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Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC5165653/
https://ncbi.nlm.nih.gov/pubmed/28008214
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/26/11/115006
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