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Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams
The ability to control nonlinear interactions of suspended mechanical structures offers a unique opportunity to engineer rich dynamical behavior that extends the dynamic range and ultimate device sensitivity. We demonstrate a displacement sensing technique based on resonant frequency monitoring of c...
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| Veröffentlicht in: | J Micromech Microeng |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2016
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5165653/ https://ncbi.nlm.nih.gov/pubmed/28008214 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/26/11/115006 |
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